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http://tailieuso.udn.vn/handle/TTHL_125/8822| Title: | Study on Material Properties of Si Thin Films Crystallized on Yttria-Stabilized Zirconia in Solid Phase by Pulsed Laser Annealing |
| Other Titles: | パルスレーザアニールによりイットリア安定化ジルコニア上に固相結晶化したSi薄膜の膜質に関する研究 Nghiên cứu thuộc tính vật liệu của màng mỏng Silic kết tinh trên lớp YSZ ở pha sắn bằng cách nung laser xung |
| Authors: | Mai, Thị Kieu Lien |
| Advisor: | Susumu, Horita, Assoc. Prof. |
| Keywords: | Poly-Si Pulsed laser YSZ Crystallization-induction layer Low temperature Solid phase crystallization TFT |
| Issue Date: | 2015-09 |
| Publisher: | Japan Advanced Institute of Science and Technology |
| Description: | Doctoral Dissertation. Major: Materials Science; 178 pages. |
| Table of contents: | Chapter 1: Introduction; Chapter 2: Theory of Solid-Phase Crystallization (SPC) of an Amorphous Film; Chapter 3: Fabrication Procedures and Evaluation Methods; ... |
| URI: | http://tailieuso.udn.vn/handle/TTHL_125/8822 |
| Appears in Collections: | Sư phạm |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| MaiThiKieuLien.TT.pdf | Abstract & Table of Contents | 167.95 kB | Adobe PDF | View/Open |
| MaiThiKieuLien.TV.pdf | Fulltext | 10.61 MB | Adobe PDF | View/Open Request a copy |
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