Study on Material Properties of Si Thin Films Crystallized on Yttria-Stabilized Zirconia in Solid Phase by Pulsed Laser Annealing

Please use this identifier to cite or link to this item: http://tailieuso.udn.vn/handle/TTHL_125/8822

Full metadata record

DC Field	Value	Language
dc.contributor.advisor	Susumu, Horita, Assoc. Prof.	-
dc.contributor.author	Mai, Thị Kieu Lien	-
dc.date.accessioned	2018-08-23T03:40:54Z	-
dc.date.available	2018-08-23T03:40:54Z	-
dc.date.issued	2015-09	-
dc.date.submitted	2015-10-01	-
dc.identifier.uri	http://tailieuso.udn.vn/handle/TTHL_125/8822	-
dc.description	Doctoral Dissertation. Major: Materials Science; 178 pages.	en
dc.description.tableofcontents	Chapter 1: Introduction; Chapter 2: Theory of Solid-Phase Crystallization (SPC) of an Amorphous Film; Chapter 3: Fabrication Procedures and Evaluation Methods; ...	en
dc.language.iso	en	en
dc.publisher	Japan Advanced Institute of Science and Technology	en
dc.source	University of Science and Education - The University of DaNang	en
dc.subject	Poly-Si	en
dc.subject	Pulsed laser	en
dc.subject	YSZ	en
dc.subject	Crystallization-induction layer	en
dc.subject	Low temperature	en
dc.subject	Solid phase crystallization	en
dc.subject	TFT	en
dc.title	Study on Material Properties of Si Thin Films Crystallized on Yttria-Stabilized Zirconia in Solid Phase by Pulsed Laser Annealing	en
dc.title.alternative	パルスレーザアニールによりイットリア安定化ジルコニア上に固相結晶化したSi薄膜の膜質に関する研究	en
dc.title.alternative	Nghiên cứu thuộc tính vật liệu của màng mỏng Silic kết tinh trên lớp YSZ ở pha sắn bằng cách nung laser xung	en
dc.type	Ph.D Thesis	en
Appears in Collections:	Sư phạm

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