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http://tailieuso.udn.vn/handle/TTHL_125/7802| Title: | Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates |
| Other Titles: | Đặc trưng nhiều thang đo của các tính chất tinh thể học trong các màng dầy AIN trồng trên các đế được tạo lối rãnh 周期溝加工テンプレート上エピタキシャルAlN厚膜のマルチスケール結晶構造評価 |
| Authors: | Dinh, Thanh Khan |
| Advisor: | SaKai, Akira, Prof. |
| Keywords: | Crystalline Properties Thick AlN Epitaxial Films Grown Trench-Patterned Templates Aluminum nitride AIN |
| Issue Date: | 2014-09 |
| Publisher: | Osaka University, Japan |
| Description: | Doctor of Philosophy in Engineering; 123 pages |
| Table of contents: | Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ... |
| URI: | http://tailieuso.udn.vn/handle/TTHL_125/7802 |
| Appears in Collections: | Kỹ thuật |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| DinhThanhKhan.TT.pdf | Abstract & Table of Contents | 1.08 MB | Adobe PDF | View/Open |
| DinhThanhKhan.TV.pdf | Fulltext | 12.05 MB | Adobe PDF | View/Open Request a copy |
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