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Title: Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates
Other Titles: Đặc trưng nhiều thang đo của các tính chất tinh thể học trong các màng dầy AIN trồng trên các đế được tạo lối rãnh
Authors: Dinh, Thanh Khan
Advisor: SaKai, Akira, Prof.
Keywords: Crystalline Properties
Thick AlN Epitaxial Films Grown
Trench-Patterned Templates
Aluminum nitride
Issue Date: 2014-09
Publisher: Osaka University, Japan
Description: Doctor of Philosophy in Engineering; 123 pages
Table of contents: Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...
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