Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates

Please use this identifier to cite or link to this item: http://tailieuso.udn.vn/handle/TTHL_125/7802

Full metadata record

DC Field	Value	Language
dc.contributor.advisor	SaKai, Akira, Prof.	-
dc.contributor.author	Dinh, Thanh Khan	-
dc.date.accessioned	2018-03-13T04:14:09Z	-
dc.date.available	2018-03-13T04:14:09Z	-
dc.date.issued	2014-09	-
dc.date.submitted	2014-10-01	-
dc.identifier.uri	http://tailieuso.udn.vn/handle/TTHL_125/7802	-
dc.description	Doctor of Philosophy in Engineering; 123 pages	en
dc.description.tableofcontents	Chapter 1. Introduction; Chapter 2. Cross-sectional X-ray microdiffraction study of thick AlN films grown on trench-patterned AlN/α-Al2O3 templates; Chapter. 3Simulation of residual strain in thick AlN films grown on trenchpatterned AlN/a-Al2O3 templates using the finite element method; ...	en
dc.language.iso	en	en
dc.publisher	Osaka University, Japan	en
dc.source	University of Education - The University of Danang	en
dc.subject	Crystalline Properties	en
dc.subject	Thick AlN Epitaxial Films Grown	en
dc.subject	Trench-Patterned Templates	en
dc.subject	Aluminum nitride	en
dc.subject	AIN	en
dc.title	Multi-Scale Characterization of Crystalline Properties in Thick AlN Epitaxial Films Grown on Trench-Patterned Templates	en
dc.title.alternative	Đặc trưng nhiều thang đo của các tính chất tinh thể học trong các màng dầy AIN trồng trên các đế được tạo lối rãnh	en
dc.title.alternative	周期溝加工テンプレート上エピタキシャルAlN厚膜のマルチスケール結晶構造評価	en
dc.type	Ph.D Thesis	en
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