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Title: A study of the curvature of a thick ALN film grown on a trench-patterned α-Al2O3 template using X-ray diffraction
Authors: Dinh, Thanh Khan
Nguyen, Quy Tuan
Keywords: Curvature
X-ray diffraction
AIN film
Trench-patterned template
Issue Date: 2015
Publisher: The University of Da Nang
Description: The University of Danang, Journal of Science and Technology, No.12(97). 2015, Vol.1; PP. 30 – 32.
ISSN: 1859 - 1531
Appears in Collections:2015

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