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dc.contributor.authorDinh, Thanh Khan-
dc.contributor.authorNguyen, Quy Tuan-
dc.identifier.issn1859 - 1531-
dc.descriptionThe University of Danang, Journal of Science and Technology, No.12(97). 2015, Vol.1; PP. 30 – 32.en
dc.publisherThe University of Da Nangen
dc.sourceThe University of Da Nangen
dc.subjectX-ray diffractionen
dc.subjectAIN filmen
dc.subjectTrench-patterned templateen
dc.titleA study of the curvature of a thick ALN film grown on a trench-patterned α-Al2O3 template using X-ray diffractionen
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